Pirani gauge-Based Enhancements for High-Performance Vacuum Systems

Author(s)	Ms. Michelle David, Prof. Dr. Pavithra G, Prof. Dr. Swapnil S Ninawe, Mr. Rahul M
Country	India
Abstract	In this paper, we present a comprehensive re-engineering of the traditional Pirani gauge to meet the evolving demands of high-performance vacuum systems. Leveraging microelectromechanical systems (MEMS) technology, we have miniaturized the thermal sensing element, drastically reducing thermal mass and improving both the response time and sensitivity. In addition, by refining the heat transfer models to account for rarefied gas dynamics, we extend the linear operating range into deeper vacuum regimes without sacrificing accuracy. To address environmental drifts, we introduce an adaptive calibration framework that employs machine learning algorithms, enabling real-time compensation for ambient temperature changes, gas composition variations, and filament aging effects.
Keywords	Pirani gauge, vacuum measurement, MEMS sensors, thermal conductivity sensing, rarefied gas dynamics, machine learning calibration, vacuum system optimization, adaptive vacuum control.
Field	Engineering
Published In	Volume 7, Issue 2, March-April 2025
Published On	2025-04-30
DOI	https://doi.org/10.36948/ijfmr.2025.v07i02.43492
Short DOI	https://doi.org/g9g77g

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International Journal For Multidisciplinary Research